Совершенствование зондовых методов исследования поверхностей триботехнических материалов на основе механики контактного взаимодействия
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1.Coefficient of friction of titanium oxynitride films deposited by hot target reactive sputtering
- Shestakov, D. S.;Useinov, A. S.;Kravchuk, K. S.;Gladkikh, E. V.;Zavyalov, A. V.;Morozova, A. A.;Smirnov, V. V.
- 《25TH INTERNATIONAL CONFERENCE ON VACUUM TECHNIQUE AND TECHNOLOGY》
- 2018年
- 会议
The influence of the oxygen flow rate on the friction coefficient of titanium oxynitride films deposited by reactive magnetron sputtering at a constant current of a hot target was investigated. The study used the plans of the active experiment and regression models of the first and second order. It is found that the increase of the oxygen flow rate in the gas environment leads to the increase of the film friction coefficient.
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