大尺寸光学元件光强传输方程非干涉在位检测方法研究

项目来源

国家自然科学基金(NSFC)

项目主持人

于瀛洁

项目受资助机构

上海大学

立项年度

2017

立项时间

未公开

项目编号

51775326

项目级别

国家级

研究期限

未知 / 未知

受资助金额

60.00万元

学科

工程与材料科学-机械设计与制造-机械测试理论与技术

学科代码

E-E05-E0511

基金类别

面上项目

关键词

精密测量 ; 非干涉相位恢复 ; 光学元件 ; 在位检测 ; 光强传输方程 ; Precision measurement ; Optical components ; in-situ testing ; non-interferometric phase retrieval ; transport of intensity equation

参与者

吕丽军;周文静;刘宏月;孙涛;武欣;董焰章;牟柯冰;陈鼎夫;丁忆磊

参与机构

上海大学;上海工程技术大学

项目标书摘要:在位检测是工件处于加工位置而非加工状态下进行的测量,可以减少切削、冷却、热变形等因素的影响,同时避免多次重复装夹引入的误差,是有效的工序中检测手段。项目提出车间环境下大尺寸光学元件光强传输方程非干涉在位检测方法,基于光的衍射理论,研究光强传输方程非干涉相位恢复的基本理论,构建非远心成像光路下光强传输方程非干涉方法的测量方程,探讨单时记录多幅离焦图像及混叠信息的分离方法,研究非远心成像光路光强传输方程的高精度相位恢复算法,在车间中与精密磨床结合建立实验装置,开展实验研究工作,积极探索车间应用的基本途径。项目的创新点在于:提出非远心成像光路光强传输方程非干涉测量方程,在空间尺度上抑制环境扰动的影响;提出采用变形衍射光栅单时记录多幅离焦图像和分离信息混叠的方法,在时间尺度上抑制环境振动的影响;提出基于少量幅数并具有频率选择性的光强传输方程相位恢复算法,为车间环境下获得近干涉测量精度提供基本保障。

Application Abstract: In-situ testing is measuring the workpiece at a processing location rather than manufacturing status.It can reduce the impacts of the cutting,cooling and thermal deformation and avoid errors introduced by repeated clamping as well.It is an effective measuring method in working procedure.The project proposes a non-interferometric technique based on the transport of intensity equation to achieve the in-situ testing of large-size optical components in workshop environment.Based on the light diffraction theory,the researchers study the measurement theory of non-interferometric phase retrieval using the transport of intensity equation,construct the measurement model of non-telecentric imaging optical path based on the transport of intensity equation,investigate the separation method of the once-time recorded multiple defocused images and aliasing information,explore high precision phase retrieval algorithm of the non-telecentric imaging optical path based on the transport of intensity equation.Combined with the precision grinding machine,the experimental device will be built in the workshop to carry out the experimental research work.The researchers will actively to explore the basic road to the application in workshop..The innovation points of the project are as follows:propose non-interferometric measurement equation of non-telecentric imaging optical path based on the transport of intensity equation to suppress the influence of environmental disturbance on the spatial scale;propose methods to record multiple defocused images at once-time and separate the aliasing information,and suppress the influence of environmental vibrations on the temporal scale;propose phase retrieval algorithm by few images,which has frequency selectivity,based on the transport of intensity equation to ensure to obtain nearly interferometric measurement precision in workshop environment.

项目受资助省

上海市

项目结题报告(全文)

项目提出光学元件光强传输方程非干涉在位检测方法,在一般的条件下即可实现高精度检测而无需满足干涉条件,大大降低了对于测量环境及测量系统的要求,适合于车间环境下的在位检测。项目基于光的衍射理论,研究光强传输方程非干涉相位恢复的基本理论,围绕着精密光学检测为中心开展核心技术研究工作,主要内容包括:(1)对基于光强传输方程的非干涉测量方法进行了研究,设计了适用于非球面柱面镜的测量光路,实现了精密光学元件的面形检测;同时利用普通有限差分TIE方法和降噪有限差分TIE方法开展了实验数据分析,获得了较好的实验比对结果;结合数字全息技术提出了DH-TIE相位恢复技术,避免了传统TIE方法采集图像过程中对硬件的移动;(2)利用基于残差学习的卷积神经网络(CNN)实现了位相噪声的去除,该方法可以消除包裹相位中信噪比达-4dB的噪声,并且所训练的CNN网络在不调整任何参数的情况下即可得到去噪结果,对比实验也验证了该方法在实测环境中的有效性;(3)研究了基于波长调谐技术的透明平板光学元件的多表面信息分离,实现了以预匹配方法为代表的自由腔长下多表面测量,可在任意测量位置实现被测件各表面形貌的重建;(4)基于贝叶斯原理,对扩展光学元件测量口径的拼接面形重建方法进行了不确定度评估研究,所提出的误差评价分析方法使柱面拼接结果的误差表征更加丰富,增加了误差的可视化能力和数据的对比性。本项目研究工作中的创新点总结如下:(1)建立了光学元件光强传输方程非干涉在位检测方法理论,构建了适用于非球面柱面元件测量系统;(2)结合数字全息技术提出了DH-TIE相位恢复技术,实现了标定板、光学球结构等检测;(3)提出了基于波长调谐技术的透明平板光学元件的多表面信息分离方法;(4)提出了基于贝叶斯理论的拼接测量不确定度评估方法,实现了在得到拼接测量结果的同时可以获知测量不确定度。

  • 排序方式:
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  • 1.Multisurface Interferometric Algorithm and Error Analysis With Adaptive Phase Shift Matching

    • 关键词:
    • Harmonic analysis; Optical variables measurement; Phase measurement;Optical surface waves; Thickness measurement; Length measurement;Surface treatment; Interferometers; measurement errors; phasemeasurement; phase shifting interferometry; reconstruction algorithms;OPTICAL-THICKNESS; SURFACE SHAPE; TRANSPARENT PLATES; FORMULAS; DESIGN
    • Chang, Lin;Valyukh, Sergiy;He, Tingting;Yu, Yingjie
    • 《IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT》
    • 2022年
    • 71卷
    • 期刊

    To simultaneously measure topographies of both surfaces of a transparent plate through wavelength-tuning interferometry at arbitrary cavity lengths, a flexible phase shift matching algorithm (FPSMA) is proposed. The FPSMA includes two parts: 1) taking the four-term third-order Nuttall window as an example, a phase demodulation approach is designed and analyzed for extracting the harmonic phases of the front surface, rear surface, and thickness variation of the measured plate and 2) based on the residual error analysis of the developed 5N-Nuttall algorithm for different cavity length coefficients M and the phase-shifting parameters N , a parameter-change technique that allows the developed phase demodulation approach is applied to arbitrary cavity lengths by adaptively changing the phase shifts and frames of the captured interferograms. By this technique, the algorithm failures due to the spectral aliasing of harmonics can be avoided effectively and conveniently, and then the correct phase demodulation can be ensured. Besides, using the developed method, when the values of N or M are chosen in advance, the corresponding available measurement ranges can be given. Besides, the relationship between the window length and the measurement limitation of the measurable thinnest optical thickness is investigated. Considering the common linear and nonlinear errors in the wavelength-shifting process, the error analysis of FPSMA is performed and discussed for situations close to reality. The comparative studies and the experimental results of two transparent parallel plates also support the performance of the developed FPSMA.

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  • 2.Research on Decoupling Model of Six-Component Force Sensor Based on Artificial Neural Network and Polynomial Regression.

    • 关键词:
    • back propagation neural network; decoupling; fiber Bragg grating sensor; polynomial fitting; six-component force sensor
    • Wang, Shuyu;Liu, Hongyue
    • 《Sensors 》
    • 2024年
    • 24卷
    • 9期
    • 期刊

    A two-stage decoupling model based on an artificial neural network with polynomial regression is proposed for the six-component force sensor load decoupling problem in the case of multidimensional mixed loading. The six-dimensional load categorization stage model constructed in the first stage combines 63 load category label sets with a deep BP neural network. The six-dimensional load regression stage model was constructed by combining polynomial regression with a BP neural network in the second stage. Meanwhile, the six-component force sensor with a fiber Bragg grating (FBG) sensor as the sensitive element was designed, and the elastomer simulation and calibration experimental dataset was established to realize the validation of the two-stage decoupling model. The results based on the simulation data show that the accuracy of the classification stage is 93.65%. The MAPE for the force channel in the regression stage is 6.29%, and 3.24% for the moment channel. The results based on experimental data show that the accuracy of the classification stage is 87.80%. The MAPE for the force channel in the regression phase is 5.63%, and 4.82% for the moment channel.

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  • 3.基于Workbench与Ncode的髋关节置换后股骨疲劳寿命仿真分析

    • 关键词:
    • 人工髋关节;股骨;有限元;疲劳寿命
    • 刘全锋;刘宏月
    • 《计量与测试技术》
    • 2023年
    • 1期
    • 期刊

    针对人工髋关节置换对股骨结构术后疲劳寿命的影响,提出基于Workbench与Ncode软件联合仿真的股骨结构疲劳寿命分析方法。利用Workbench软件对髋关节置换后的股骨结构进行步态静力学分析,仿真结果结合Ncode软件,实现股骨结构疲劳寿命分

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  • 4.子孔径拼接柱面干涉测量关键技术研究

    • 关键词:
    • 子孔径拼接 干涉测量 圆柱面测量 近圆柱面测量 不确定度表征 基金资助:国家自然科学基金项目“大尺寸光学元件光强传输方程非干涉在位检测方法研究”(No.51775326); 专辑:基础科学 工程科技Ⅰ辑 专题:物理学 金属学及金属工艺 DOI:10.27300/d.cnki.gshau.2021.000688 分类号:TG806O436.1 导师:于瀛洁 手机阅读
    • 期刊

    以精密轴系为代表的柱状零件在航空航天、数控机床、精密仪器等各类工程领域中肩负着重要的使命。在同步辐射装置、强激光系统、卫星制导及导航系统等大型光路结构中对于柱状光学元件的精度与质量也有着很高的要求。传统的接触式的测量方法轴向采样率低,导致无法多频段的反映被测柱面的形貌误差。基于干涉原理的面阵测量技术相比于接触式的单点扫描测量方法可以实现非接触、高精度和高分辨率的圆柱度测量,已经被证明是针对圆柱面测量行之有效的测量方法。本文基于子孔径干涉拼接技术开展圆柱面测量的研究,旨在以圆柱面干涉测量的失调误差分离方法、自适应圆柱测量调整策略、圆柱度误差评价、圆柱面和近圆柱面测量方法等为研究目标,为柱类零件提供高精度的面形测量方法和丰富的误差表征。本文的主要工作如下:(1)圆柱面干涉测量的失调误差分离方法:针对圆柱面干涉测量系统中被测圆柱面的空间位置引起的失调像差问题,推导了被测物体空间位置误差与相位失调像差的关系,提出了分离方法,有效地分离了真实面形和失调像差。实验结果表明,分离后的残余误差约为实际面形分布的5%。(2)自适应圆柱拼接测量调整策略:针对高精度圆柱的测量要求,构建了圆柱拼接测量调整测量装置,并提出了拼接测量中的自适应调整策略。通过分析圆柱的空间姿态并进行调整补偿,实现了圆柱的自适应调平调心、自动采样测量和计算,减少了失调误差对测量结果的影响。本文所构建的装置可以实现几分钟内对圆柱的调平调心。精调摆正后被测圆柱其轴线相对于转台轴线的水平误差小于±10μm,偏摆误差小于±0.2μrad。所提出的调整策略提升了干涉拼接测量方法的鲁棒性,保证了拼接结果的可靠性。(3)干涉拼接测量圆柱度误差评价:针对干涉面阵测量方法所提供的高分辨率、高采样密度的数据,本文深化了基于CGH重建圆柱面误差的评价分析,从功率谱密度、中低频误差的分离、不确定度的计算等方面构建了评价参数。对圆柱面面形误差进行功率谱密度分析,获取其素线与圆周方向的空间频率特性分布。设计针对圆柱面形的二维高斯滤波权函数,实现了圆柱面形中低频信息的分离与提取。针对圆柱面干涉拼接结果不确定度缺失的问题,归纳了圆柱面子孔径干涉拼接测量的一些误差来源,分析子孔径干涉拼接模型,计算被测柱面各点的不确定度分布。同时,本文提出了一种基于贝叶斯统计分析的圆柱度误差不确定度评价方法。将环境误差引入到单孔径先验信息,构建了全局最优的子孔径联合概率分布函数,通过马尔科夫链蒙特卡洛法实现了对圆柱度的不确定度区间的计算,增强了柱面拼接测量结果圆柱度值的可信赖度。(4)圆柱面和近圆柱面面形误差的测量方法:针对圆柱面和近圆柱面透镜边缘子孔径缺乏约束的问题,提出了圆柱面子孔径干涉拼接的迭代算法,在计算过程中多次调整子孔径的空间位置,获得高精度、无拼接痕迹的圆柱透镜表面面形,抑制了重叠区域的子孔径残差。针对近圆柱面表面离轴子孔径的高陡度偏差问题,基于现有的测量条件提出了偏摆CGH的近圆柱面拼接测量方法。验证了CGH不同偏转角与生成彗差波前的线性关系。通过调整CGH产生具有特定彗差的波前,配准近圆柱面透镜离轴子孔径的表面面形,获得可分辨的干涉条纹和相位,实现对近圆柱面离轴孔径的相位重建,利用迭代拼接的方法实现高陡度曲面的形貌重建。测量结果与轮廓仪比较,面形分布相符。上述研究工作为圆柱度误差干涉测量的展开提供了理论技术基础,实现了对陶瓷塞规、金属轴类、玻璃圆柱、圆柱透镜和近圆柱透镜等多种轴类零件的测量。本文所提出的方法具有非接触式和高分辨率的特点,相比目前方法所展示的结果具有更高的轴向分辨率和更丰富的误差表征能力,更加直观的反映柱类零件表面的面形误差,为研制新型的高精度圆柱度误差测量仪器建立了基础。

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  • 5.Stitching interferometry of cylindrical surface

    • 关键词:
    • Stitching interferometry; Cylindricity; Two-Dimensional GaussianWeighting; Function; Ceramic plug gage; Power Spectrum Density; 2DLegendre polynomials
    • Chen, Dingfu;Yin, Zhijun;Chen, Zhu;Valyukh, Sergiy;Yu, Yingjie
    • 《OPTICS AND LASERS IN ENGINEERING》
    • 2022年
    • 157卷
    • 期刊

    High resolution and high precision are advantages of measuring cylindrical objects employing stitching interferometry. However, due to errors in the cylinder position in a measurement procedure, it is difficult to ensure the accuracy of a macroscopic shape contour and surface waviness contour of the workpiece of the stitching results. To overcome this problem, we proposed a new strategy of stitching interferometry for cylindricity calibration. The measuring process is divided into two parts to measure the macroscopic shape and waviness contour, respectively. Finally, the two measurement results are merged to produce an accurate and complete 360 degrees form map. Besides, we build a two-dimensional Gaussian filter weighting function for a cylindrical profile according to its special shape characteristic. To express the stitching results more precisely, we provide the uncertainty map and power spectral density of the stitching results. An experiment is carried out by taking a ceramic plug gage as the workpiece. The results demonstrate the excellent performance of our method in analyzing the characteristic of the cylindrical profile and show good agreement with such by using cylindricity measuring instruments.

    ...
  • 6.Virtual temporal phase-shifting phase extraction using generative adversarial networks

    • 关键词:
    • CALIBRATION; ALGORITHM
    • Yan, Ketao;Khan, Aamir;Asundi, Anand;Zhang, Yi;Yu, Yingjie
    • 《APPLIED OPTICS》
    • 2022年
    • 61卷
    • 10期
    • 期刊

    In this paper, a virtual temporal phase-shifting method based on generative adversarial networks (GANs) is proposed to realize dynamic measurement, which is referred to as PSNet. The proposed PSNet can produce the virtual phase-shifting fringe patterns from the single-frame fringe pattern, and the standard n-step phase-shifting method is employed to obtain the wrapped phase from the virtual fringe patterns. The wrapped phase can further be unwrapped by the unwrapping algorithm. Simulation analysis shows that the PSNet can produce the virtual phase-shifting fringe patterns without noise, and thus, the denoising process is eliminated. The performance of the method is verified from the captured fringe in the interferometer, which demonstrates the practicability of the proposed method. (C) 2022 Optica Publishing Group

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  • 7.A general auto-shift minimal-step phase-shifting algorithm for arbitrary cavity length

    • 关键词:
    • Wavefronts;Errors;Parameter estimation;Phase modulation;Precision engineering;Optical variables measurement;Demodulation;Interferometry;Cavity length;Demodulation algorithms;Phase demodulation;Phase-shifting;Phase-shifting algorithm;Phase-shifting by wavelength-tuning;Residual error;Wave front reconstruction;Wavelength tuning;Window functions
    • Chang, Lin;He, Tingting;Yu, Yingjie
    • 《Optics and Lasers in Engineering》
    • 2022年
    • 149卷
    • 期刊

    Phase demodulation by wavelength-tuning phase-shifting interferometry is increasingly significant for precision metrology of engineering surfaces. However, the existing multi-surface measurement algorithms can only be applied to the case that the cavity length of the measured plate is a certain multiple of its optical thickness. For flexible muti-surface interferometry, we present a general auto-shift minimal-step phase-shifting algorithm (AMPA) for arbitrary cavity lengths. To achieve this, as a basis, the in-depth analysis of the residual error of the phase demodulation algorithm under each combination of the cavity coefficient M and the phase division number N is performed. By this method, the residual error of the phase demodulation algorithm can be controlled by adjusting N for each M. And due to a wise selection of the Blackman-Harris window function, the satisfactory abilities of harmonic error suppression and phase extraction can be provided. The performance of the developed algorithm is studied under various factors, and its superiority over traditional algorithms is verified. Based on the Zernike polynomials, the numerical simulation indicates the maximum error of reconstructed wavefronts is less than 2 × 10−5λ0. Experimental studies on a rectangular plate and a circular plate using a Fizeau wavelength-tuning interferometer further imply that our algorithm is valid and reliable. Meanwhile, a comparative analysis of the reconstructed surface shapes using the developed AMPA and the classical 36-step and 6N-5 algorithms is performed based on the introduced height evaluation parameters. The comparative results show that the maximum errors of the arithmetic mean height Sa and the root mean square height Sq are 6.8 nm and 6.5 nm, respectively. And other height parameters also support the validity of the proposed algorithm.
    © 2021

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  • 8.Multi-surface phase-shifting algorithm using the window function fitted by the nonlinear least squares method

    • 关键词:
    • Demodulation;Least squares approximations;Optical variables measurement;Phase modulation;Errors;Demodulation algorithms;Fitting algorithms;Multi-surface;Non-linear least squares;Nonlinear least squares methods;Phase demodulation;Phase-shifting algorithm;Surface phasis;Wavelength tuning;Window functions
    • Chang, Lin;Valyukh, Sergiy;He, Tingting;Chen, Zhu;Yu, Yingjie
    • 《Journal of Modern Optics》
    • 2022年
    • 69卷
    • 3期
    • 期刊

    A multi-surface phase demodulation algorithm is proposed to measure surfaces of the transparent plate simultaneously. A non-linear least-squares method based on the trust region is utilized to fit the window function derived from the characteristic polynomials. The fitted window function requires fewer parameters and has a flexible form, which means the window length can be stretched freely and used flexibly. Then, a multi-surface phase demodulation technique combining the discrete Fourier principle and the fitted window function is investigated, allowing simultaneous reconstruction of the measured front surface, rear surface, and thickness variation. During the implementation of our algorithm, the processing time for the interferograms with 850×850 pixels is around 5.1s. Measurement errors caused by several factors are analyzed, including wavelength-tuning error, frequency order error, cavity length error, and average thickness error. The experimental result on a rectangular transparent plate further verifies the effectiveness of our algorithm.
    © 2021 Informa UK Limited, trading as Taylor & Francis Group.

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  • 9.Measurement of acylindrical surface with transport of intensity equation

    • 关键词:
    • PHASE RETRIEVAL; MICROSCOPY; SYSTEMS
    • Lin, Xingyu;Chen, Dingfu;Zhang, Hongbo;Ying, Zhijun;Asundi, Anand;Yu, Yingjie
    • 《APPLIED OPTICS》
    • 2022年
    • 61卷
    • 5期
    • 期刊

    High-precision aspherical cylindrical (acylindrical) lenses are difficult to directly measure because of the phase deviation in the off-axis region. To achieve rapid and non-contact measurement of the acylindrical lens surface, a novel optical structure phase measurement, to the best of our knowledge, is presented in this work. Both common finite-difference and noise-reduction finite-difference methods were used for solving the transport of intensity equation (TIE) for reconstruction of high-resolution surface measurement. The results suggest that both common finite-difference and noise-reduction finite-difference methods can obtain good measurement results. The proposed method allows for the direct measurement of surface information without interference stitching. The accuracy of the TIE measurement has been verified through direct contact measurement. (C) 2022 Optica Publishing Group

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