项目来源

台湾省政府科研基金(GRB)

项目主持人

庄赋祥

项目受资助机构

台湾省虎尾科技大学光电与材料科技研究所

立项年度

2011

立项时间

未公开

项目编号

NSC100-2622-E150-031-CC3

研究期限

未知 / 未知

项目级别

省级

受资助金额

407.00千元台币

学科

材料科技；光电工程

学科代码

未公开

基金类别

应用研究/学术补助

关键词

PECVD ; TiO2 ; 自清洁 ; 掺杂离子 ; LED ;

参与者

未公开

参与机构

未公开

项目标书摘要：本计昼主要利用电浆化学气相沉积糸统成长高品质二氧化钦光触媒薄膜於圆筒型不钟钢过滤心上，让圆筒型不锈钢过滤心有自清洁(self-cleaning)效果，并且掺杂金属离子(Ag,Cu,Zr,Co)或气体原子(N2)於二氧化钛薄膜中，使二氧化钛能隙降低，提升光触媒之氧化还原反应至可见光波段。首先为了达到在圆柱形不锈钢滤心表面均匀沉积二氧化钛薄膜之目标，将设计与实验出电浆反应腔糸统抽气帮浦之抽气率与腔内反应气体之气流方向。设计出电浆反应腔之shower head或气流喷让分布管路，经由修改气体喷洒管路孔洞大小、孔洞间隙及气体喷洒管路之排列情形，使腔体内均匀分布气体分子，接着设计抽气帮浦之抽气速率，利用高抽气速率之抽气帮浦，让腔体内有较低的制程压力(10〜100 mtorr),以达到圆柱形不锈钢滤心(直径10cm、高度25cm)上中下表面均能均匀成长二氧化钛薄膜之目标。接着研发二氧化钛掺杂金属离子(Ag,Cu,Zr,Co)或气体原子(N2),以利於增加对可见光波段(400〜500 nm)之吸收及提升UV光对二氧化钛氧化还原反应之效率。最後设计UV光及可见光(蓝光)之LED晶片排列组合模组，利用LED晶片不同之排列组合方式以分析二氧化钛之氧化还原反应效率，以最佳LED排列组合达到二氧化钛最佳氧化还原特性，以降低LED模组制作成本，未来圆柱形不锈钢过滤心之产品价格亦可随之降低。

Application Abstract: In this proposal,high quality TiO2 photocatalytic films will be deposited on cylinder stainless-steel(SUS)filters by plasma enhanced chemical vapor deposition(PECVD),which thus will bear self-cleaning effects.The TiO2 films will be doped with metallic ions(such as Ag,Cu,Zr,Co)or gas atoms(such as N or C)with metal organic sources or gases,respectively.Those doped TiO2 films will posses lower energy gaps and shift(or extend)the absorption spectra for photocatalytic redox to visible range.Therefore,the self-cleaning effects in UV spectrum and redox in visible range for TiO2 can be increased.In first part of the experiment,in order to obtain an uniform TiO2 film on cylinder SUS filter surface(10cm diameter and 25cm height),a high pumping speed mechanical and roots pump will be employed to achieve low pressure(10〜100 mtorr)in the PECVD chamber,inside which the injection(and distribution)pipelines and gas flowing routes will be designed,too.In order to obtain uniform gas distribution,the shower head patterns,injection pipeline distribution and pin-hole sizes along the injection pipelines will be designed during the experiments.Therefore,high uniform of TiO2 on cylinder stainless-steel filters can be achieved.In the second part,the TiO2 films will be doped with metallic ions(such as Ag,Cu,Zr or Co from metal organic sources)or gas atoms(N or C from gases)in order to increase the redox reaction in UV range and extend the photocatalytic absorption to the visible range(400〜500 nm).Finally,LED modules employing both UV and blue LED chips with optimized arrays will be fabricated,which should be designed by checking the redox reaction efficiency with related to the LED arrays.The UV-blue LED modules will be used to illuminate on doped TiO2 films to achieve high self-cleaning efficiency.Due to the optimum design,the price of LED array modules will be cost down,then the self-cleaning SUS cylinder filter with UV-blue LED illumination array module will be cost down,too.So if the company utilizes a kind of self-cleaning film deposited on the SUS cylinder filter,their product’s service lifetime will be extended and filtering and cleaning effects will be improved,too.

项目受资助省

台湾省